Fabrication and Morphological Characterization of Nano-Scale Interconnects for 3D-Integration

Murugesan Mariappan, Mitsumasa Koyanagi, Hiroyuki Hashimoto, Ji Chel Bea, Takafumi Fukushima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Fabrication and Morphological Characterization of Nano-Scale Interconnects for 3D-Integration'. Together they form a unique fingerprint.

Chemistry

Physics

Pharmacology, Toxicology and Pharmaceutical Science

Material Science

Chemical Engineering