Fabrication and magnetic control of Y3Fe5O12 cantilevers

Yong Jun Seo, Kazuya Harii, Ryo Takahashi, Hiroyuki Chudo, Koichi Oyanagi, Zhiyong Qiu, Takahito Ono, Yuki Shiomi, Eiji Saitoh

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


We have fabricated ferrite cantilevers in which their vibrational properties can be controlled by external magnetic fields. Submicron-scale cantilever structures were made from Y3Fe5O12 films by physical etching combined with the use of a focused ion beam milling technique. We found that the cantilevers exhibit two resonance modes which correspond to horizontal and vertical vibrations. Under external magnetic fields, the resonance frequency of the horizontal mode increases, while that of the vertical mode decreases, quantitatively consistent with our numerical simulation for magnetic forces. The changes in resonance frequencies with magnetic fields reach a few percent, showing that an efficient magnetic control of resonance frequencies was achieved.

Original languageEnglish
Article number132409
JournalApplied Physics Letters
Issue number13
Publication statusPublished - 2017 Mar 27

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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