@inproceedings{ac84b2acb2eb410a83ec13b93a1a2a3a,
title = "Fabrication and in-plane electrical resistivity of Ge/SiGe quantum dot superlattices",
author = "K. Hayashi and S. Abiko and N. Motegi and T. Kajitani",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/IMNC.2007.4456153",
language = "English",
isbn = "4990247248",
series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
pages = "160--161",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",
}