Fabrication and evaluation of single-crystal-silicon tunable grating using polymer-based membrane transfer bonding process

We developed a fabrication process of MEMS tunable grating supported by patterned polymer. The tunable grating was fabricated on single crystal silicon with thickness of 260 nm using membrane transfer bonding technique on glass. To obtain a good defined anchor structure of grating, two kinds of polymers were used for the fabrication of bonded wafer. The characteristic of the tunable grating ribbon was measured. The tunable grating ribbon was successfully actuated with the time to peak of 26 μs. Changing of diffraction pattern of the device was also demonstrated.