Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology

Nguyen Van Toan, Tomohiro Kubota, Halubai Seknar, Seiji Samukawa, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We present the fabrication and evaluation of silicon micromechanical resonators fabricated by neutral beam etching (NBE) to obtain narrow capacitive gap size for small motional resistance and low insertion loss. The resonant frequency of the fabricated devices with a length of 500 μm, width of 440 μm and thickness of 5 μm is 9.66 MHz, and the average quality factor (Q) value is around 78,000. The devices fabricated by both deep reactive ion etching (DRIE) and NBE are evaluated and compared. The devices fabricated by NBE show that the motional resistances are reduced by almost 11 times from 645 kΩ to 59 kΩ and their output signals (insertion loss) are increased by approximately 15 dB in comparison with those fabricated by DRIE.

Original languageEnglish
Title of host publication9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-5
Number of pages5
ISBN (Electronic)9781479947270
DOIs
Publication statusPublished - 2014 Sep 23
Event9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014 - Waikiki Beach, United States
Duration: 2014 Apr 132014 Apr 16

Publication series

Name9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014

Other

Other9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2014
CountryUnited States
CityWaikiki Beach
Period14/4/1314/4/16

Keywords

  • Silicon micromechanical resonator
  • deep reactive ion etching
  • low temperature co-fired ceramic
  • neutral beam etching technology
  • silicon on insulator

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology'. Together they form a unique fingerprint.

Cite this