Fabrication and evaluation of assembled micro-tube resonator for mass measurement in flowing liquid

Mohammad Akita Indianto, Masaya Toda, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this research, an assembled micro-tube resonator for mass sensing in liquid is fabricated and evaluated. The fabrication process of this assembled micro-tube resonator is simply combining three different fabrications of a groove part, a micro-tube part, and a glass part, which are fabricated by common micromachining. Flowing liquid is injected as the evaluation of mass change detection performance of the device. The evaluated result shows consistent value with the actual mass. Self-oscillation experiment has been used for recording actual mass change based on the resonance frequency shift with flowing liquid using digital data logger. Minimum mass resolution of the device, which is calculated by noise analysis, is in the value of 1.04 pg.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1261-1264
Number of pages4
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Indianto, M. A., Toda, M., & Ono, T. (2018). Fabrication and evaluation of assembled micro-tube resonator for mass measurement in flowing liquid. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 1261-1264). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346793