Fabrication and dielectric properties of barium strontium titanate nano-particles/amorphous lead zirconate titanate composite thin film

Tomokazu Tanase, Yoshio Kobayashi, Takao Miwa, Mikio Konno

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

A low temperature synthetic method, which combines metal-organic decomposition and a nm-seeding technique, was applied to the fabrication of barium strontium titanate (BST) nano-particle/amorphous lead zirconate titanate (PZT) composite thin films. A metal-organic solution of PZT was mixed with a suspension of BST nano-crystalline particles to prepare a precursor solution. The mixed solution was spin-coated on a Pt/Ti/SiO2/Si substrate and annealed at various temperatures to prepare composite thin films with a thickness around 300 nm. Organic components in the films decomposed at 350 °C, and the composite film of PZT amorphous and BST nano-crystalline particles could be prepared at this temperature. The film had smooth surface with a root mean square roughness less than 20 nm. The dielectric constant and dissipation factor of the composite thin films at 10 kHz obtained 70 and 0.036, respectively.

Original languageEnglish
Pages (from-to)22-26
Number of pages5
JournalThin Solid Films
Volume485
Issue number1-2
DOIs
Publication statusPublished - 2005 Aug 1

Keywords

  • Coatings
  • Dielectric properties
  • Nanostructures and surface morphology

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Fingerprint

Dive into the research topics of 'Fabrication and dielectric properties of barium strontium titanate nano-particles/amorphous lead zirconate titanate composite thin film'. Together they form a unique fingerprint.

Cite this