Fabrication and control of fine periodic surface structures by short pulsed laser

Shuhei Kodama, Akihiro Shibata, Shinya Suzuki, Keita Shimada, Masayoshi Mizutani, Tsunemoto Kuriyagawa

Research output: Contribution to conferencePaperpeer-review

Abstract

Ultrashort-pulsed laser irradiation is a more efficient approach for fabricating fine surface structures than traditional processing methods. However, it has some problems that the equipment expenses usually increase with shortening of the pulse length, and the process principle has not been clarified completely, yet the collisional relaxation time (CRT) is assumed to be a major factor. Thus in this study, a 20-ps-pulsed laser was employed to fabricate nanometer-sized periodic structures on stainless steel alloy, SUS304. The pitch length of the fabricated fine periodic structures was similar to the laser wavelength, and also results suggested that periodic structures can be fabricated within a limited range of the laser fluence. In order to expand the effective fluence range (EFR) and to control the pitch length, laser irradiation was carried out with changing the workpiece temperature and the laser wavelength. In this way, CRT was extended and EFR was expanded by cooling the workpiece and the pitch lengths were approximately equal to the irradiated laser wavelengths. Consequently, it is easier to fabricate the fine periodic structures by cooling the workpiece than at ordinary temperature and it is possible to control the pitch length of fine periodic structures by changing the laser wavelength.

Original languageEnglish
Publication statusPublished - 2015 Oct 18
Event8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan
Duration: 2015 Oct 182015 Oct 22

Other

Other8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
CountryJapan
CityKyoto
Period15/10/1815/10/22

Keywords

  • Collision relaxation time
  • Effective fluence range
  • Laser wavelength
  • Short pulsed laser
  • Temperature

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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