Fabrication and characterization of silicon micromirror with carbon nanotubes-nickel nanocomposite beams

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this paper, we present the fabrication and characterization of a silicon micromirror with carbon nanotubes (CNTs)-nickel (Ni) nanocomposite beams, and evaluate the mechanical stability of the micromirror in terms of resonant frequency. A novel electroplating method is developed for synthesis of the CNTs-Ni nanocomposite. CNTs are pretreated to have positive charges on their surface and added into a Ni electroplating solution to form a CNTs-Ni nanocomposite electroplating suspension. The weight fraction of the CNT in the electroplated nanocomposite is 9.1 wt%, and the ultramicroindentation hardness is 13 GPa. The mechanical strengthening improvement is found in the nanocomposite in comparison with a Ni film. The maximum variation of the resonant frequency of the micromirror during a long term stability test is about 0.4%, and its scanning angle is about 11°. It shows the potential ability of the CNTs-Ni nanocomposite with proper design for microstructure application.

Original languageEnglish
Title of host publicationProceedings of the IEEE Conference on Nanotechnology
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages888-892
Number of pages5
ISBN (Electronic)9781479956227
DOIs
Publication statusPublished - 2014 Nov 26
Event2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014 - Toronto, Canada
Duration: 2014 Aug 182014 Aug 21

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
ISSN (Electronic)1944-9399

Other

Other2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014
CountryCanada
CityToronto
Period14/8/1814/8/21

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Computer Science Applications
  • Modelling and Simulation
  • Instrumentation

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