Fabrication and characterization of self-standing W-nanodendrites on insulator SiO2 substrate with electron-beam-induced deposition in HVTEM

Guoqiang Xie, Minghui Song, Kazutaka Mitsuishi, Kazuo Furuya

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Self-standing W-nanodendrite structures were fabricated on an insulator SiO2 substrate using an electron-beam-induced deposition process in a high voltage transmission electron microscope (HVTEM). Its growth process and microstructure were investigated using conventional and high-resolution transmission electron microscopy (CTEM and HRTEM) and X-ray energy dispersive spectroscopy (EDS). The fabricated structures were observed and analyzed in situ or after the fabrication using a JEM-ARM1000 TEM and and EDS attached to a JEM-2010F TEM. It was found that the dendrite structures grow only in the area of electron beam irradiation and the area can be controlled with controlling the electron beam.

    Original languageEnglish
    Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
    Pages142-143
    Number of pages2
    Publication statusPublished - 2004 Dec 1
    Event2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
    Duration: 2004 Oct 262004 Oct 29

    Publication series

    NameDigest of Papers - Microprocesses and Nanotechnology 2004

    Other

    Other2004 International Microprocesses and Nanotechnology Conference
    Country/TerritoryJapan
    CityOsaka
    Period04/10/2604/10/29

    ASJC Scopus subject areas

    • Engineering(all)

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