Fabrication and characterization of self-standing W-Nanodendrites on insulator SiO2 substrate by electron-beam-induced deposition under HVTEM

Guoqiang Xie, Minghui Song, Kazutaka Mitsuishi, Kazuo Furuya

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

Self-standing W-nanodendrite structures were fabricated on an insulator SiO2 substrate by electron-beam-induced deposition under a 1000 kV high-voltage transmission electron microscope (HVTEM). The growth process and as-fabricated structures were characterized by conventional and high-resolution transmission electron microscopies (CTEM and HRTEM) and X-ray energy dispersive spectroscopy (EDS). The nucleation and growth of nanodendrite structures are attributed to a mechanism involving charge-up produced on the substrate surface, and the movement of charges to and charge accumulation at the convex surface of the substrate as well as the tips of the deposits. The as-fabricated nanodendrite structures possess a high crystallinity and a high content of tungsten. The structures consist of many nanometer-scale body-centered cubic (bcc) W crystals.

Original languageEnglish
Pages (from-to)5654-5658
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume44
Issue number7 B
DOIs
Publication statusPublished - 2005 Jul 26
Externally publishedYes

Keywords

  • Electron-beam-induced deposition
  • HRTEM
  • Nanodendrite
  • Nanofabrication
  • Sio substrate

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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