Fabrication and characterization of Nd1+xBa2-xCu3O7-y thin films deposited by metal-organic chemical vapor deposition using liquid state sources

Yoshifumi Kumagai, Yutaka Yoshida, Morihiro Iwata, Masato Hasegawa, Yoshihiro Sugawara, Tukasa Hirayama, Yuichi Ikuhara, Izumi Hirabayashi, Yoshiaki Takai

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    14 Citations (Scopus)


    We have fabricated Nd1+xBa2-xCu3O7-y (NBCO) superconducting thin films by metal-organic chemical vapor deposition (MOCVD) using non-fluorinated sources. At oxygen partial pressures Fo2 = 0.85 Torr and Po2 = 0.65 Torr, the films with the composition deviated from the stoichiometry (Nd:Ba:Cu = 1:2:3) have better crystallinity than those with the stoichiometric composition. However, at Po2 = 0.01 Torr, high quality c-axis oriented films with the stoichiometric composition are obtained. This is closely related to the Nd-Ba substitution. The films deposited at Po2 = 0.65 Torr show semiconducting properties by DC four prove method and superconducting properties by SQUID measurement. On the other hand, the films deposited at Po2 = 0.01 Torr show superconductivity by both electric and magnetic measurements. TEM-EDX observation on the films deposited at Po2 = 0.65 Torr revealed that the phase separation according to the Nd-Ba substitution was the cause of the different behaviors of electrical and magnetic properties.

    Original languageEnglish
    Pages (from-to)35-42
    Number of pages8
    JournalPhysica C: Superconductivity and its applications
    Issue number1-2
    Publication statusPublished - 1998 Aug 1


    • C-axis length
    • Liquid source
    • MOCVD
    • Nd-Ba substitution
    • NdBaCuO
    • TEM-EDX
    • Thin film

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Energy Engineering and Power Technology
    • Electrical and Electronic Engineering

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