Fabrication and characterization of micromachined quartz-crystal cantilever for force sensing

Yu Ching Lin, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

A highly sensitive thin rectangle cantilevered resonator of AT-cut quartz crystal with the capability of self-sensing using the piezoelectric effect has been developed for force and nanometric sensing. The fabrication and characterization of quartz crystal cantilever-shape resonators are reported. The thin cantilevers along the electrical axis (the x-axis) of the quartz crystal have metal electrodes at both sides and were fabricated by deep reactive ion etching using a Ni mask pattern with thicknesses of 15-27 νm. Its force sensing principle using the quartz cantilever is based on the resonant frequency changes in the case that an external force is applied. Shear vibration in the direction of the electrical axis can be piezoelectrically excited, which was characterized by impedance measurements. Despite the weak electromechanical coupling, flexural and torsional vibrations can be excited and piezoelectrically detected. The detectable minimum noise of the piezoelectric detection was about 0.08 nm Hz-0.5 and a sensitivity of 8 mV nm-1 of the third flexural mode was achieved.

Original languageEnglish
Pages (from-to)2426-2432
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume15
Issue number12
DOIs
Publication statusPublished - 2005 Dec 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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