This work presents the fabrication and characterization of micromachined piezoelectric energy harvesters (EHs) utilizing flexible Pb(Nb,Zr,Ti)O3(PZNT)/SUS foils. Micromachining stainless steel (SUS) foils using photoresist mask was crucial for MEMS energy harvesters and was addressed by electrochemical etching (EE). We achieved the high etching rate of 1.3 μm/min, vertical-to-lateral etching ratio of 2.6:1, and small roughness of 250 nm by using (4H3PO4:1H2SO4) electrolyte. The technique enabled us to scale down PNZT/SUS-based EHs with a total dimension of 2.54 mm × 1.75 mm × 0.5 mm. The EH provided the power of 5.12 μW at 10 m.s-2. This results in the best normalized power density (NPD) of 3.13 mW.cm-3.g-2 from the flexible ferroelectric-on-metal substrates.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 2018 Jul 26|
|Event||17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017 - Kanazawa, Japan|
Duration: 2017 Nov 14 → 2017 Nov 17
ASJC Scopus subject areas
- Physics and Astronomy(all)