Fabrication and characterization of micromachined piezoelectric energy harvesters exploiting flexible Pb(Nb,Zr,Ti)O3/SUS

T. Takahashi, L. Van Minh, K. Umeda, T. Fujii, H. Kuwano

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)

Abstract

This work presents the fabrication and characterization of micromachined piezoelectric energy harvesters (EHs) utilizing flexible Pb(Nb,Zr,Ti)O3(PZNT)/SUS foils. Micromachining stainless steel (SUS) foils using photoresist mask was crucial for MEMS energy harvesters and was addressed by electrochemical etching (EE). We achieved the high etching rate of 1.3 μm/min, vertical-to-lateral etching ratio of 2.6:1, and small roughness of 250 nm by using (4H3PO4:1H2SO4) electrolyte. The technique enabled us to scale down PNZT/SUS-based EHs with a total dimension of 2.54 mm × 1.75 mm × 0.5 mm. The EH provided the power of 5.12 μW at 10 m.s-2. This results in the best normalized power density (NPD) of 3.13 mW.cm-3.g-2 from the flexible ferroelectric-on-metal substrates.

Original languageEnglish
Article number012039
JournalJournal of Physics: Conference Series
Volume1052
Issue number1
DOIs
Publication statusPublished - 2018 Jul 26
Event17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017 - Kanazawa, Japan
Duration: 2017 Nov 142017 Nov 17

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint

Dive into the research topics of 'Fabrication and characterization of micromachined piezoelectric energy harvesters exploiting flexible Pb(Nb,Zr,Ti)O<sub>3</sub>/SUS'. Together they form a unique fingerprint.

Cite this