Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT structure

Shinya Yoshida, Nan Wang, Masafumi Kumano, Yusuke Kawai, Shuji Tanaka, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science