Fabrication and characterization of GaP photonic crystals for terahertz wave application

Kyosuke Saito, Kei Nozawa, Tadao Tanabe, Yutaka Oyama, Ken Suto, Jun Ichi Nishizawa, Tetsuo Sasaki, Tomoyuki Kimura

Research output: Contribution to journalArticle

Abstract

We have fabricated GaP two-dimensional photonic crystals (PCs) for terahertz (THz) wave generation by a reactive ion etching in Ar/Cl 2 gas chemistries. We performed 75-μm-deep etching of GaP, in which Al 2O 3 layer is applied as a hard mask with its selectivity as high as 125. We demonstrated the THz-wave generation from the fabricated GaP slab waveguide with the PC structure as a cladding layer under a collinear phase-matched difference frequency generation. In the frequency dependence of THz output power for the PC slab waveguide is seen at around 1.1 THz. From the in-plane transmission spectrum of THz-wave, we confirmed that the THz output characteristics had relation with the photonic structure for THz wave.

Original languageEnglish
Pages (from-to)2340-2342
Number of pages3
JournalMaterials Transactions
Volume48
Issue number9
DOIs
Publication statusPublished - 2007 Sep 1

Keywords

  • Collinear phase matching
  • GaP
  • Optical waveguide
  • Phonon-polariton
  • Photonic crystal
  • Terahertz-wave

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Fabrication and characterization of GaP photonic crystals for terahertz wave application'. Together they form a unique fingerprint.

  • Cite this

    Saito, K., Nozawa, K., Tanabe, T., Oyama, Y., Suto, K., Nishizawa, J. I., Sasaki, T., & Kimura, T. (2007). Fabrication and characterization of GaP photonic crystals for terahertz wave application. Materials Transactions, 48(9), 2340-2342. https://doi.org/10.2320/matertrans.MAW200728