Fabrication and characterization of elliptically-curved, laterally-graded multilayers for focusing X-ray polychromator applications

Tadashi Hatano, Tetsuo Harada, Tadashi Matsushita, Etsuo Arakawa, Yasuo Higashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We have developed a novel X-ray multilayer working as a focusing polychromator. A multilayer mirror enables independent designs of the focal length and the spectral dispersion, and much higher throughput than the curved crystal. Our ion beam sputtering deposition apparatus has a speed programmable shuttering system for control of the lateral thickness gradient. A SiC/C and three V/C multilayers were deposited on each 150 mm long Si wafers. Period thicknesses are tuned to the designed energy of 5-12 keV, 12-19 keV, 19-26 keV and 26-33 keV, respectively. Four multilayers were clamped to form a 600 mm long 5-33 keV range elliptic mirror on a shaped Cu base plate. The focal length is 700 mm, which is large enough for setups around the sample position. The energy calibration was performed at BL-15C of the Photon Factory based on absorption edges of metal foils, which was in good agreement with the period thickness measured by a laboratory X-ray diffractometer.

Original languageEnglish
Title of host publicationSRI 2009 - The 10th International Conference on Synchrotron Radiation Instrumentation
Pages669-672
Number of pages4
DOIs
Publication statusPublished - 2010 Aug 3
Event10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009 - Melbourne, VIC, Australia
Duration: 2009 Sep 272009 Oct 2

Publication series

NameAIP Conference Proceedings
Volume1234
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009
CountryAustralia
CityMelbourne, VIC
Period09/9/2709/10/2

Keywords

  • X-ray
  • laterally graded
  • multilayer
  • polychromator
  • reflectometry

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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