TY - GEN
T1 - Fabrication and characterization of an integrated Schottky emitter array for multi-beam lithography applications
AU - Tsai, Ching Hsiang
AU - Ono, Takahito
AU - Esashi, Masayoshi
PY - 2007/12/1
Y1 - 2007/12/1
N2 - The design, fabrication and characterization of an integrated Schottky emitter array are presented and demonstrated. The integrated emitter array consists of boron-doped diamond heaters with a diamond tip, Si micro gate array and Si focusing lens array. The diamond film is selectively deposited using electrophoresis of diamond seed particles and a hot filament chemical vapor deposition (HF-CVD) technique. The emitters, gate and lens array are electrically isolated from each other on a Pyrex glass substrate. When heating the diamond emitter at a voltage of 2.8 V, an emission current of 490 nA has been observed at an electric field of 0.36 V/μ,m. The emission current was found to be stable with a fluctuation of 2 % per hr. By fitting the measure data with Schottky emission model, the temperature at the emitter was calculated to be 1680°C.
AB - The design, fabrication and characterization of an integrated Schottky emitter array are presented and demonstrated. The integrated emitter array consists of boron-doped diamond heaters with a diamond tip, Si micro gate array and Si focusing lens array. The diamond film is selectively deposited using electrophoresis of diamond seed particles and a hot filament chemical vapor deposition (HF-CVD) technique. The emitters, gate and lens array are electrically isolated from each other on a Pyrex glass substrate. When heating the diamond emitter at a voltage of 2.8 V, an emission current of 490 nA has been observed at an electric field of 0.36 V/μ,m. The emission current was found to be stable with a fluctuation of 2 % per hr. By fitting the measure data with Schottky emission model, the temperature at the emitter was calculated to be 1680°C.
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M3 - Conference contribution
AN - SCOPUS:52249116470
SN - 1424409519
SN - 9781424409518
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 373
EP - 376
BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Y2 - 21 January 2007 through 25 January 2007
ER -