Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno, Kay Nottmeyer, Cleopatra Cabuz, Kazuyuki Minami, Takashi Kobayashi, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate'. Together they form a unique fingerprint.

Chemical Compounds

Physics & Astronomy

Engineering & Materials Science