Extremely high aspect ratio metal structures for suspension of a micro optical shutter

Allan P. Hui, Risaku Toda, Masayoshi Esashi

Research output: Contribution to journalConference articlepeer-review

Abstract

A bulk micromachining process for fabricating extremely high aspect ratio metal structures is developed. The structures are thin films perpendicular to the plane of the substrate. The metal structures offer various physical and chemical properties depending on the choice of the metal used. Internal stress considerations for the choice of metal are also discussed.

Original languageEnglish
Pages (from-to)233-238
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3513
Publication statusPublished - 1998
EventProceedings of the 1998 Conference on Microelectronic Structures and MEMS for Optical Processing IV - Santa Clara, CA, USA
Duration: 1998 Sep 211998 Sep 22

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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