Extension of Fracture Lifetime of Silicon Scanning Micromirror by Coating with Atomic Layer Deposited Alumina Thin Film

Yuuki Fujita, Takashi Sasaki, Koichi Fukuda, Nguyen Thanh Tung, Fumio Ogawa, Toshiyuki Hashida, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Mathematics

Engineering & Materials Science

Physics & Astronomy