Extension of Fracture Lifetime of Silicon Scanning Micromirror by Coating with Atomic Layer Deposited Alumina Thin Film

Yuuki Fujita, Takashi Sasaki, Koichi Fukuda, Nguyen Thanh Tung, Fumio Ogawa, Toshiyuki Hashida, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The silicon scanning micromirrors were coated with atomic layer deposited (ALD) alumina thin film and several fracture characteristics were measured. The coated ALD alumina films were 2.64 nm and 10.6nm in thickness. The fractural lifetime of the coated mirror was extended by more than one-order of cycles than that without coating in the stress amplitude region lower than approximately 2.5 GPa.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages549-552
Number of pages4
ISBN (Electronic)9781665412674
DOIs
Publication statusPublished - 2021 Jun 20
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: 2021 Jun 202021 Jun 25

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period21/6/2021/6/25

Keywords

  • alumina coating
  • atomic layer deposition
  • fracture lifetime
  • micromirror
  • torsion bar

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Instrumentation

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