Extended X-ray emission fine structure (EXEFS)

We show that a similar structure to the extended X-ray absorption fine structure (EXAFS) is observable in the line shape of X-ray fluorescence spectra. Using this similarity, we can measure the soft X-ray EXAFS using a hard X-ray beam line. The incident beam energy is required only to be high enough to excite the characteristic X-ray line. Therefore a monochromatized incident beam is not required. Measurement of the Al K-edge EXAFS of AlN excited by X-rays from an Rh anode X-ray tube using this method is described as an example.