Experiments using a nano-machining instrument for nano-cutting brittle materials

Wei Gao, Robert J. Hocken, John A. Patten, John Lovingood

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

This paper presents a nano-machining instrument, which was developed for conducting nano-cutting experiments especially on brittle materials. A PZT tube scanner is employed to accomplish a maximum depth of cut of 4 μm with 0.1 nm resolution, and a length of cut of 20 μm. The cutting motions are feedback-controlled by using the output of a capacitance probe. There are two force sensors to measure thrust and cutting forces with a resolution of sub-milliNewtons. The sample is kinematically mounted on the PZT scanner, and the tilt of the sample can be adjusted precisely. Experiments of nano-scratching and nano-cutting on single crystal silicon were carried out.

Original languageEnglish
Pages (from-to)439-442
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume49
Issue number1
DOIs
Publication statusPublished - 2000 Jan 1

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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