Experimental study of fullerene-family formation using radio-frequency-discharge reactive plasmas

H. Ishida, N. Satake, G. H. Jeong, Y. Abe, T. Hirata, R. Hatakeyama, K. Tohji, K. Motomiya

Research output: Contribution to journalConference articlepeer-review

24 Citations (Scopus)


A formation regime of fullerenes and carbon nanotubes in glow-discharge reactive plasmas is investigated in order to gain sharp insight into the relation between plasma characteristics and the generation processes of the fullerene families. The plasma is produced in a mixture of CH4 and a small fraction of H2 by the radio-frequency (RF) discharge across an externally-applied magnetic field. The plasma is found to be apparently localized around the RF electrode under certain conditions determined by the magnetic field strength and reactive-gas pressure. In this case, it is demonstrated that fullerenes and carbon nanotubes are most effectively generated on the RF electrode, which is negatively self-biased, and exposed to a strong plasma-sheath drop. Our results indicate that the creation of radical species, such as hydrocarbon precursors, due to the local discharge around the RF electrode, the sheath acceleration of positively-charged particles such as carbon ions, and the abstraction of the hydrogen from hydrogenated-carbon species or clusters, are important in the nucleation, formation, and growth of the fullerene families.

Original languageEnglish
Pages (from-to)26-31
Number of pages6
JournalThin Solid Films
Issue number1-2
Publication statusPublished - 2002 Mar 22
EventProceedinggs of the 14th Symposium on Plasma Science for Marteri (SPSM-14) - Tokyo, Japan
Duration: 2001 Jun 132001 Jun 14


  • Carbon nanotube
  • Fullerene
  • Radio-frequency glow discharge
  • Reactive plasma

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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