Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures

Kang Won Lee, Young Jin Noh, Wei Gao, Yoshikazu Arai, Yuki Shimizu, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

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Engineering & Materials Science