Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures

Kang Won Lee, Young Jin Noh, Wei Gao, Yoshikazu Arai, Yuki Shimizu, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

This paper presents the experimental results of investigating the performances of an air-bearing displacement sensor for surface form measurement of micro-structures, such as micro-lenses, on an ultra-precision machine tool. The sensor consists of a stylus for contacting the surface, a shaft for mounting the stylus, an air-bearing for suspending the shaft and a blade spring for applying the measuring force against the surface. At first, experiments were conducted on a vibration isolated table to identify the basic performance of the sensor for displacement measurement. Then, the sensor was mounted on a diamond turning machine for evaluating the performance of the sensor for on-machine surface form measurement of micro-lenses. A roll workpiece, on which a micro-lens array was fabricated by using a fast tool servo on the diamond turning machine, was employed as the specimen for the on-machine experiment of surface profile measurement.

Original languageEnglish
Pages (from-to)671-678
Number of pages8
JournalInternational Journal of Precision Engineering and Manufacturing
Volume12
Issue number4
DOIs
Publication statusPublished - 2011 Aug 1

Keywords

  • Air-bearing
  • Linear encoder
  • Measurement
  • Micro-lens
  • Micro-structure
  • Sensor
  • Stylus
  • Surface form

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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