Experimental Evaluation of the Mo Ka X-Ray Probing Depth for a GaAs Wafer in a Total-Reflection X-Ray Fluorescence Analysis

Kouichi Tsuji, Kazuaki Wagatsuma, Takeo Oki

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Experimental Evaluation of the Mo K<sub>a</sub> X-Ray Probing Depth for a GaAs Wafer in a Total-Reflection X-Ray Fluorescence Analysis'. Together they form a unique fingerprint.

Chemical Compounds