Aiming for evaluating the catalytic efficiency of atomic nitrogen recombination for silicon carbide materials, experimental and numerical study is performed. In the experiment, the inductively coupled plasma of nitrogen with argon is produced in a quartz tube at room temperature and under the total pressures of 0.09 and 2.1 Pa. The axial distribution of the emission spectrum in the wavelength range from 380 to 935 nm for silicon carbide test piece is obtained by emission spectroscopy. For the purpose of comparison, those without test piece as well as for copper test piece are also obtained. Then, the axial emission intensity distributions of atomic nitrogen 821.6 nm and argon 811.5 nm spectral lines are extracted from the obtained emission spectrum. The computational fluid dynamics computation is also carried out in order to understand the flowfield properties around the test piece. A theoretical model of the surface catalysis is incorporated into the computational code and the catalytic efficiency is given parametrically. In this paper, the obtained experimental and numerical results are shown and the estimation of the catalytic efficiency value is attempted by comparing between them.