Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling element

Keitaro Tanno, Yusuke Kawai, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, the synchronization of coupled resonators is investigated. Mechanically coupled three resonators are fabricated, and the synchronized condition of these resonators is evaluated. When the frequency of external driving force approaches to the lowest resonant frequency of the coupled resonators, the entrainment of resonance occurred in other resonators, where the frequency ratios become integer and their phase differences are locked. Moreover, the width of the entrainment region is dependent on the amplitude of resonators. Using a basic physical model of the coupled three resonators, we estimated the coupling springs, which show a strong nonlinearity.

Original languageEnglish
Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages563-566
Number of pages4
DOIs
Publication statusPublished - 2012 May 7
Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
Duration: 2012 Jan 292012 Feb 2

Other

Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
CountryFrance
CityParis
Period12/1/2912/2/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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