Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling element

Keitaro Tanno; Yusuke Kawai; Takahito Ono

doi:10.1109/MEMSYS.2012.6170238

Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling element

Keitaro Tanno, Yusuke Kawai, Takahito Ono

ENG - Mechanical Systems Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

In this paper, the synchronization of coupled resonators is investigated. Mechanically coupled three resonators are fabricated, and the synchronized condition of these resonators is evaluated. When the frequency of external driving force approaches to the lowest resonant frequency of the coupled resonators, the entrainment of resonance occurred in other resonators, where the frequency ratios become integer and their phase differences are locked. Moreover, the width of the entrainment region is dependent on the amplitude of resonators. Using a basic physical model of the coupled three resonators, we estimated the coupling springs, which show a strong nonlinearity.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	563-566
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170238
Publication status	Published - 2012 May 7
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 2012 Jan 29 → 2012 Feb 2

Other

Other	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	12/1/29 → 12/2/2

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2012.6170238

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Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling element. / Tanno, Keitaro; Kawai, Yusuke; Ono, Takahito.

2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 563-566 6170238.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tanno, K, Kawai, Y & Ono, T 2012, Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling element. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170238, pp. 563-566, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 12/1/29. https://doi.org/10.1109/MEMSYS.2012.6170238

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title = "Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling element",

abstract = "In this paper, the synchronization of coupled resonators is investigated. Mechanically coupled three resonators are fabricated, and the synchronized condition of these resonators is evaluated. When the frequency of external driving force approaches to the lowest resonant frequency of the coupled resonators, the entrainment of resonance occurred in other resonators, where the frequency ratios become integer and their phase differences are locked. Moreover, the width of the entrainment region is dependent on the amplitude of resonators. Using a basic physical model of the coupled three resonators, we estimated the coupling springs, which show a strong nonlinearity.",

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year = "2012",

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doi = "10.1109/MEMSYS.2012.6170238",

language = "English",

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AU - Tanno, Keitaro

AU - Kawai, Yusuke

AU - Ono, Takahito

PY - 2012/5/7

Y1 - 2012/5/7

N2 - In this paper, the synchronization of coupled resonators is investigated. Mechanically coupled three resonators are fabricated, and the synchronized condition of these resonators is evaluated. When the frequency of external driving force approaches to the lowest resonant frequency of the coupled resonators, the entrainment of resonance occurred in other resonators, where the frequency ratios become integer and their phase differences are locked. Moreover, the width of the entrainment region is dependent on the amplitude of resonators. Using a basic physical model of the coupled three resonators, we estimated the coupling springs, which show a strong nonlinearity.

AB - In this paper, the synchronization of coupled resonators is investigated. Mechanically coupled three resonators are fabricated, and the synchronized condition of these resonators is evaluated. When the frequency of external driving force approaches to the lowest resonant frequency of the coupled resonators, the entrainment of resonance occurred in other resonators, where the frequency ratios become integer and their phase differences are locked. Moreover, the width of the entrainment region is dependent on the amplitude of resonators. Using a basic physical model of the coupled three resonators, we estimated the coupling springs, which show a strong nonlinearity.

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U2 - 10.1109/MEMSYS.2012.6170238

DO - 10.1109/MEMSYS.2012.6170238

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BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

Y2 - 29 January 2012 through 2 February 2012

ER -

Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling element

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