Evidence of a Love wave bandgap in a quartz substrate coated with a phononic thin layer

Ting Wei Liu, Yu Ching Lin, Yao Chuan Tsai, Takahito Ono, Shuji Tanaka, Tsung Tsong Wu

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

This paper presents a numerical and experimental study of Love wave propagation in a micro-fabricated phononic crystal (PC) structure consisting of a 2D, periodically etched silica film deposited on a quartz substrate. The dispersion characteristics of Love waves in such a phononic structure were analyzed with various geometric parameters by using complex band structure calculations. For the experiment, we adopted reactive-ion etching with electron-beam lithography to fabricate a submicrometer phononic structure. The measured results exhibited consistency with the numerical prediction. The results of this study may serve as a basis for developing PC-based Love wave devices.

Original languageEnglish
Article number181905
JournalApplied Physics Letters
Volume104
Issue number18
DOIs
Publication statusPublished - 2014 May 5

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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