Evaporation of silver during chemical vapor deposition process for YBa2Cu3O7 and its effect on microstructure

Yanwei Ma, Kazuo Watanabe, Satoshi Awaji, Mitsuhiro Motokawa

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

YBa2Cu3O7 (YBCO) films were simultaneously grown on both silver and MgO substrates by a chemical vapor deposition (CVD) technique. It is found that the transportation of silver occurs through the evaporation of silver from the silver substrate at the processing temperature of 850°C. The effect of the evaporation of silver during deposition was investigated. The silver vapor travels a distance of a few millimeters over the surface of a neighboring MgO substrate. It is also demonstrated for the first time that the presence of silver vapor causes some microstructural changes in the film grown on the MgO substrate.

Original languageEnglish
Pages (from-to)6339-6343
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume40
Issue number11
DOIs
Publication statusPublished - 2001 Nov

Keywords

  • CVD
  • Evaporation of silver
  • MgO
  • Morphology change
  • Silver substrate
  • Vapor pressure

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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