Evaluation of TiO2-SiO2 ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system

Jun Ichi Kushibiki; Mototaka Arakawa; Tetsuji Ueda; Akira Fujinoki

doi:10.1117/12.772259

Evaluation of TiO₂-SiO₂ ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system

Jun Ichi Kushibiki, Mototaka Arakawa, Tetsuji Ueda, Akira Fujinoki

MEN - Biomedical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

In this paper, we tried to fabricate a TiO₂-doped SiO ₂ (TiO₂-SiO₂) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.

Original language	English
Title of host publication	Emerging Lithographic Technologies XII
DOIs	https://doi.org/10.1117/12.772259
Publication status	Published - 2008 Dec 1
Event	Emerging Lithographic Technologies XII - San Jose, CA, United States Duration: 2008 Feb 26 → 2008 Feb 28

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6921
ISSN (Print)	0277-786X

Other

Other	Emerging Lithographic Technologies XII
Country/Territory	United States
City	San Jose, CA
Period	08/2/26 → 08/2/28

Keywords

CTE evaluation
Euvl system
Fictive temperature
Heat treatment
Homogenization process
Leaky surface acoustic waves
Line-focus-beam ultrasonic material characterization system
TiO-siO ultra-low-expansion glass
Velocity measurement

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.772259

Cite this

Kushibiki, J. I., Arakawa, M., Ueda, T., & Fujinoki, A. (2008). Evaluation of TiO₂-SiO₂ ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system. In Emerging Lithographic Technologies XII [69213P] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6921). https://doi.org/10.1117/12.772259

Evaluation of TiO₂-SiO₂ ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system. / Kushibiki, Jun Ichi; Arakawa, Mototaka; Ueda, Tetsuji et al.

Emerging Lithographic Technologies XII. 2008. 69213P (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6921).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kushibiki, JI, Arakawa, M, Ueda, T & Fujinoki, A 2008, Evaluation of TiO₂-SiO₂ ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system. in Emerging Lithographic Technologies XII., 69213P, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6921, Emerging Lithographic Technologies XII, San Jose, CA, United States, 08/2/26. https://doi.org/10.1117/12.772259

@inproceedings{c3c2577574b24392b7ad661f3f7d5b7e,

title = "Evaluation of TiO2-SiO2 ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system",

abstract = "In this paper, we tried to fabricate a TiO2-doped SiO 2 (TiO2-SiO2) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.",

keywords = "CTE evaluation, Euvl system, Fictive temperature, Heat treatment, Homogenization process, Leaky surface acoustic waves, Line-focus-beam ultrasonic material characterization system, TiO-siO ultra-low-expansion glass, Velocity measurement",

author = "Kushibiki, {Jun Ichi} and Mototaka Arakawa and Tetsuji Ueda and Akira Fujinoki",

year = "2008",

month = dec,

day = "1",

doi = "10.1117/12.772259",

language = "English",

isbn = "9780819471062",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Emerging Lithographic Technologies XII",

note = "Emerging Lithographic Technologies XII ; Conference date: 26-02-2008 Through 28-02-2008",

}

TY - GEN

T1 - Evaluation of TiO2-SiO2 ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system

AU - Kushibiki, Jun Ichi

AU - Arakawa, Mototaka

AU - Ueda, Tetsuji

AU - Fujinoki, Akira

PY - 2008/12/1

Y1 - 2008/12/1

N2 - In this paper, we tried to fabricate a TiO2-doped SiO 2 (TiO2-SiO2) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.

AB - In this paper, we tried to fabricate a TiO2-doped SiO 2 (TiO2-SiO2) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.

KW - CTE evaluation

KW - Euvl system

KW - Fictive temperature

KW - Heat treatment

KW - Homogenization process

KW - Leaky surface acoustic waves

KW - Line-focus-beam ultrasonic material characterization system

KW - TiO-siO ultra-low-expansion glass

KW - Velocity measurement

UR - http://www.scopus.com/inward/record.url?scp=77955379023&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77955379023&partnerID=8YFLogxK

U2 - 10.1117/12.772259

DO - 10.1117/12.772259

M3 - Conference contribution

AN - SCOPUS:77955379023

SN - 9780819471062

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Emerging Lithographic Technologies XII

T2 - Emerging Lithographic Technologies XII

Y2 - 26 February 2008 through 28 February 2008

ER -