Evaluation of TiO2-SiO2 ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system

Jun Ichi Kushibiki; Mototaka Arakawa; Tetsuji Ueda; Akira Fujinoki

doi:10.1117/12.772259

Evaluation of TiO₂-SiO₂ ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system

Jun Ichi Kushibiki, Mototaka Arakawa, Tetsuji Ueda, Akira Fujinoki

MEN - Biomedical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

In this paper, we tried to fabricate a TiO₂-doped SiO ₂ (TiO₂-SiO₂) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.

Original language	English
Title of host publication	Emerging Lithographic Technologies XII
DOIs	https://doi.org/10.1117/12.772259
Publication status	Published - 2008 Dec 1
Event	Emerging Lithographic Technologies XII - San Jose, CA, United States Duration: 2008 Feb 26 → 2008 Feb 28

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6921
ISSN (Print)	0277-786X

Other

Other	Emerging Lithographic Technologies XII
Country	United States
City	San Jose, CA
Period	08/2/26 → 08/2/28

Keywords

CTE evaluation
Euvl system
Fictive temperature
Heat treatment
Homogenization process
Leaky surface acoustic waves
Line-focus-beam ultrasonic material characterization system
TiO-siO ultra-low-expansion glass
Velocity measurement

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.772259

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Kushibiki, J. I., Arakawa, M., Ueda, T., & Fujinoki, A. (2008). Evaluation of TiO₂-SiO₂ ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system. In Emerging Lithographic Technologies XII [69213P] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6921). https://doi.org/10.1117/12.772259

Evaluation of TiO₂-SiO₂ ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system. / Kushibiki, Jun Ichi; Arakawa, Mototaka; Ueda, Tetsuji; Fujinoki, Akira.

Emerging Lithographic Technologies XII. 2008. 69213P (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6921).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kushibiki, JI, Arakawa, M, Ueda, T & Fujinoki, A 2008, Evaluation of TiO₂-SiO₂ ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system. in Emerging Lithographic Technologies XII., 69213P, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6921, Emerging Lithographic Technologies XII, San Jose, CA, United States, 08/2/26. https://doi.org/10.1117/12.772259

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abstract = "In this paper, we tried to fabricate a TiO2-doped SiO 2 (TiO2-SiO2) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.",

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AB - In this paper, we tried to fabricate a TiO2-doped SiO 2 (TiO2-SiO2) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.

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