Evaluation of TiO2-SiO2 ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system

Jun Ichi Kushibiki, Mototaka Arakawa, Tetsuji Ueda, Akira Fujinoki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, we tried to fabricate a TiO2-doped SiO 2 (TiO2-SiO2) glass ingot by the soot method, and homogenized the glass ingot by the zone-melting method. Homogeneities of the specimens were evaluated by measuring leaky surface acoustic wave (LSAW) velocity using the line-focus-beam ultrasonic material characterization system at 225 MHz. Two-dimensional LSAW velocity distributions having an average velocity of 3304.08 m/s with a maximum velocity difference of 3.85 m/s were measured for a homogenized specimen. Striae were not observed for the specimen. The velocity difference corresponds to 17.0 ppb/K from the sensitivity of the LSAW velocity to the CTE {4.41 (ppb/K)/(m/s)}. However, the velocity distributions excluding the edge parts were within ±1.13 m/s, corresponding to the CTE specification of ±5 ppb/K required for EUVL-grade glass. We also discussed the relationship between LSAW velocities and fictive temperatures by heat-treating a part of the homogenized specimen.

Original languageEnglish
Title of host publicationEmerging Lithographic Technologies XII
DOIs
Publication statusPublished - 2008 Dec 1
EventEmerging Lithographic Technologies XII - San Jose, CA, United States
Duration: 2008 Feb 262008 Feb 28

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6921
ISSN (Print)0277-786X

Other

OtherEmerging Lithographic Technologies XII
CountryUnited States
CitySan Jose, CA
Period08/2/2608/2/28

Keywords

  • CTE evaluation
  • Euvl system
  • Fictive temperature
  • Heat treatment
  • Homogenization process
  • Leaky surface acoustic waves
  • Line-focus-beam ultrasonic material characterization system
  • TiO-siO ultra-low-expansion glass
  • Velocity measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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    Kushibiki, J. I., Arakawa, M., Ueda, T., & Fujinoki, A. (2008). Evaluation of TiO2-SiO2 ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system. In Emerging Lithographic Technologies XII [69213P] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6921). https://doi.org/10.1117/12.772259