Evaluation of thin film noise suppressor applied to noise emulator chip implemented in 65 nm CMOS technology

Sho Muroga, Yasushi Endo, Wataru Kodate, Yoshiaki Sasaki, Kumpei Yoshikawa, Yuta Sasaki, Makoto Nagata, Masahiro Yamaguchi

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


This paper reports the shielding effect of soft magnetic film as a thin film noise suppressor applied to a test chip implemented in 65 nm seven metal CMOS technology. This test chip is equipped with a noise generator circuit. The 0.2-1-μm-thick magnetic films, which are integrated with polyimide substrates, are mounted onto the noise generator circuit in the test chip, and 2-μm-thick magnetic film is directly integrated to the passivation of the test chip. These films are deposited by RF magnetron spattering. The shield effect is evaluated by magnetic near-field measurement using planar shielded loop probe and 3-D full-wave electromagnetic field simulation. As a result, we successfully demonstrate a shield effect of 7.7 dB at a crock frequency of 200 MHz with 2-μ m-thick CoZrNb film. Furthermore, the result of the thickness dependence of the shielding effect revealed that a permeability-thickness product (μr × tm) of 1 950 μ m is required as the design target for obtaining 10 dB suppression.

Original languageEnglish
Article number6028098
Pages (from-to)4485-4488
Number of pages4
JournalIEEE Transactions on Magnetics
Issue number10
Publication statusPublished - 2011 Oct


  • Electromagnetic compatibility
  • electromagnetic noise suppressor
  • magnetic field measurement
  • shielding effect
  • thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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