Evaluation of thermal decomposition characteristics of active specialty gases on various metal surfaces using FT-IR method

Yasuyuki Shirai, Seok kiu Lee, Shinji Miyoshi, Tadahiro Ohmi

Research output: Contribution to journalConference articlepeer-review

10 Citations (Scopus)

Abstract

It is said that the metal surface has more catalytic effect as it becomes clean. In this work, we have evaluated the thermal decomposition characteristics of active specialty gases on several metal surfaces in order to find out the best surface for delivering precisely using FT-IR for in-situ measurement in gaseous phase. It was found that the thermal decomposition characteristics of active specialty gas was extremely different due to metal surface. Especially, the PH3 gas decomposed from room temperature on Ni surface. As a result, we confirmed a perfect Cr2O3 passive surface which we had already developed have good properties for active specialty gas distribution system.

Original languageEnglish
Pages (from-to)17-21
Number of pages5
JournalInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
Publication statusPublished - 1995 Dec 1
EventProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA
Duration: 1995 Apr 301995 May 5

ASJC Scopus subject areas

  • Environmental Engineering

Fingerprint Dive into the research topics of 'Evaluation of thermal decomposition characteristics of active specialty gases on various metal surfaces using FT-IR method'. Together they form a unique fingerprint.

Cite this