Abstract
A method to evaluate Young's modulus and Poison's ratio of a micro-cantilever is demonstrated using resonant frequency measurements of deflection and torsional vibrations. Both vibrations of the cantilever were exited by a new cantilever holder, and they were measured separately using an optical lever. Five modes of resonant frequencies for deflection and three modes for torsion were obtained. Young's modulus and Poison's ratio were estimated by fitting the theoretically calculated resonant frequencies to the experimental results.
| Original language | English |
|---|---|
| Pages (from-to) | 3265-3266 |
| Number of pages | 2 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 36 |
| Issue number | 5 SUPPL. B |
| Publication status | Published - 1997 May 1 |
Keywords
- Cantilever beam
- Deflection
- Diagonal vibration
- Optical lever
- Poison's ratio
- Resonant frequency
- Silicon nitride
- Thin film
- Torsion
- Young's modulus
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)