Evaluation of the elastic properties of a cantilever using resonant frequencies

Shizuka Nakano, Ryutaro Maeda, Kazushi Yamanaka

Research output: Contribution to journalReview article

15 Citations (Scopus)

Abstract

A method to evaluate Young's modulus and Poison's ratio of a micro-cantilever is demonstrated using resonant frequency measurements of deflection and torsional vibrations. Both vibrations of the cantilever were exited by a new cantilever holder, and they were measured separately using an optical lever. Five modes of resonant frequencies for deflection and three modes for torsion were obtained. Young's modulus and Poison's ratio were estimated by fitting the theoretically calculated resonant frequencies to the experimental results.

Original languageEnglish
Pages (from-to)3265-3266
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number5 SUPPL. B
Publication statusPublished - 1997 May 1

Keywords

  • Cantilever beam
  • Deflection
  • Diagonal vibration
  • Optical lever
  • Poison's ratio
  • Resonant frequency
  • Silicon nitride
  • Thin film
  • Torsion
  • Young's modulus

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Evaluation of the elastic properties of a cantilever using resonant frequencies'. Together they form a unique fingerprint.

  • Cite this