Evaluation of TEM specimen quality prepared by focused ion beam using symmetry breaking index of convergent-beam electron diffraction

Daisuke Morikawa, Masaki Ageishi, Kaori Sato, Kenji Tsuda, Masami Terauchi

Research output: Contribution to journalArticlepeer-review

Abstract

Degradation of the crystalline quality of transmission electron microscopy specimens in silicon prepared with different conditions has been examined using convergent-beam electron diffraction (CBED). The specimens are prepared using focused ion beam (FIB) with different accelerating voltages, Ar-ion milling and crushing method. Symmetry breaking of CBED patterns was quantitatively evaluated by symmetry breaking index S, which has been previously reported. The degradation and inhomogeneity of the FIB specimen were suppressed by decreasing the accelerating voltages of the FIB fabrication in the final process.

Original languageEnglish
Pages (from-to)394-397
Number of pages4
JournalMicroscopy
Volume70
Issue number4
DOIs
Publication statusPublished - 2021 Aug 1

Keywords

  • FIB
  • convergent-beam electron diffraction
  • crushing method
  • degraded crystalline layer
  • ion milling
  • symmetry breaking index

ASJC Scopus subject areas

  • Structural Biology
  • Instrumentation
  • Radiology Nuclear Medicine and imaging

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