Evaluation of sputtered Pd76Cu6Si18 metallic glass for MEMS application

Klaus Vogel, Maik Wiemer, Thomas Gessner, Juergen Vogel, Yu Ching Lin, Yao Chuan Tsai, Masayoshi Esashi, Takashiro Tsukamoto, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science