Evaluation of sputtered Pd76Cu6Si18 metallic glass for MEMS application

Klaus Vogel, Maik Wiemer, Thomas Gessner, Juergen Vogel, Yu Ching Lin, Yao Chuan Tsai, Masayoshi Esashi, Takashiro Tsukamoto, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The thin film metallic glass Pd76Cu6Si18 exhibits unique material properties. Its utilization in MEMS devices requires the evaluation of both process compatibility as well as mechanical properties. This paper focuses on the fabrication of suitable test structures for the measurement of the Young's modulus and layer stress depending on the sputter conditions and corresponding composition. The layer properties can be adjusted to meet the requirements by tuning deposition parameters such as the chamber pressure.

Original languageEnglish
Title of host publicationSmart Systems Integration 2015 - 9th International Conference and Exhibition on Integration Issues of Miniaturized Systems
Subtitle of host publicationMEMS, NEMS, ICs and Electronic Components, SSI 2015
PublisherApprimus Verlag
Pages240-247
Number of pages8
ISBN (Electronic)9783863592967
Publication statusPublished - 2015 Jan 1
EventSmart Systems Integration 2015 - 9th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2015 - Copenhagen, Denmark
Duration: 2015 Mar 112015 Mar 12

Publication series

NameSmart Systems Integration 2015 - 9th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2015

Other

OtherSmart Systems Integration 2015 - 9th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2015
CountryDenmark
CityCopenhagen
Period15/3/1115/3/12

ASJC Scopus subject areas

  • Computer Science Applications
  • Computer Networks and Communications
  • Artificial Intelligence

Fingerprint Dive into the research topics of 'Evaluation of sputtered Pd<sub>76</sub>Cu<sub>6</sub>Si<sub>18</sub> metallic glass for MEMS application'. Together they form a unique fingerprint.

Cite this