Evaluation of soft x-ray multilayer optics using synchrotron radiation

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)524-527
    Number of pages4
    JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
    Volume80
    Issue number6
    DOIs
    Publication statusPublished - 2014 Jun

    Keywords

    • Acceptance
    • Emittance
    • Multilayer
    • Reflectometry
    • Soft X-ray
    • Synchrotron radiation

    ASJC Scopus subject areas

    • Mechanical Engineering

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