Evaluation of soft x-ray multilayer optics using synchrotron radiation

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)524-527
Number of pages4
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume80
Issue number6
DOIs
Publication statusPublished - 2014 Jun

Keywords

  • Acceptance
  • Emittance
  • Multilayer
  • Reflectometry
  • Soft X-ray
  • Synchrotron radiation

ASJC Scopus subject areas

  • Mechanical Engineering

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