Evaluation of Si 3 N 4 /Si interface by UV Raman spectroscopy

A. Ogura, T. Yoshida, D. Kosemura, Y. Kakemura, T. Aratani, M. Higuchi, S. Sugawa, A. Teramoto, T. Ohmi, Takeo Hattori

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Fingerprint Dive into the research topics of 'Evaluation of Si <sub>3</sub> N <sub>4</sub> /Si interface by UV Raman spectroscopy'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy