Evaluation of Scanning Micromirror with Acoustic Cavity

Takashi Sasaki, Takuya Kanesawa, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The effect of the acoustic cavity for scanning micromirror have been evaluated. The dimension of mirror is 2.8 mm square and the resonant frequency is about 19.5 kHz. The rotational amplitude of the mirror was periodically changed depending on the length of the cavity set below mirror. The amplitude was increased by 38 % compared with minimum state of the amplitude.

Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
PublisherIEEE Computer Society
ISBN (Print)9781509063727
DOIs
Publication statusPublished - 2018 Sep 4
Event23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Switzerland
Duration: 2018 Jul 292018 Aug 2

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume2018-July
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
CountrySwitzerland
CityLausanne
Period18/7/2918/8/2

Keywords

  • acoustic cavity
  • radiation
  • resonator
  • scanning micromirror

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Sasaki, T., Kanesawa, T., & Hane, K. (2018). Evaluation of Scanning Micromirror with Acoustic Cavity. In International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings [8454523] (International Conference on Optical MEMS and Nanophotonics; Vol. 2018-July). IEEE Computer Society. https://doi.org/10.1109/OMN.2018.8454523