Evaluation of Piezoelectric Ta 2 O 5 Thin Films Using Line-Focus-Beam Ultrasonic Material Characterization System

Ryota Suenaga, Masahi Suzuki, Shoji Kakio, Yuji Ohashi, Mototaka Arakawa, Jun Ichi Kushibiki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A line-focus-beam ultrasonic material character-rization (LFB-UMC)system provides the velocities and normalized attenuation factor of leaky surface acoustic waves (LSAWs)excited on a water-loaded material surface. The normalized attenuation factor includes leakage loss into water because LSAWs propagate at the boundary between the water and the material. Therefore, to evaluate acoustical loss using the LFB-UMC system, it is necessary to subtract the calculated leakage loss from the measured attenuation. In this study, the evaluation of the acoustical loss of a thin film was examined using an X-axis-oriented tantalum pentoxide (Ta 2 O 5 )thin film, but the normalized attenuation factor calculated using the determined material constants was larger than the measured normalized attenuation factor because some material constants could not be accurately determined. However, since the characteristics of high-order LSAWs vary considerably, different elastic properties were observed from those in previous study. Comparing the elastic constants determined from the measured results with the reported values, C 12 and C 55 were 35% and 14% smaller than the previous values, respectively. By measuring multiple SAW modes, it was observed that some elastic constants greatly differed from those in the previous study.

Original languageEnglish
Title of host publication2018 IEEE International Ultrasonics Symposium, IUS 2018
PublisherIEEE Computer Society
ISBN (Electronic)9781538634257
DOIs
Publication statusPublished - 2018 Dec 17
Event2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
Duration: 2018 Oct 222018 Oct 25

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2018-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Other

Other2018 IEEE International Ultrasonics Symposium, IUS 2018
CountryJapan
CityKobe
Period18/10/2218/10/25

Keywords

  • X-axis-oriented Ta2O5
  • leaky SAW
  • line-focus-beam material characterization system

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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