@article{92060b94e0284b4fa39193709817edcd,
title = "Evaluation of Partially Sulfurized Titanium Oxide Thin Film by Surface X-ray Diffraction",
author = "Takahiro Nakamura and Atsushi Muramatsu and Nobuaki Sato and Shunichi Sato and Eiichiro Matsubara and Jyunji Saida",
note = "Copyright: Copyright 2017 Elsevier B.V., All rights reserved.",
year = "2006",
month = jan,
doi = "10.3131/jvsj.49.114",
language = "English",
volume = "49",
pages = "114--119",
journal = "Shinku/Journal of the Vacuum Society of Japan",
issn = "0559-8516",
number = "2",
}