Evaluation of Partially Sulfurized Titanium Oxide Thin Film by Surface X-ray Diffraction

Takahiro Nakamura, Atsushi Muramatsu, Nobuaki Sato, Shunichi Sato, Eiichiro Matsubara, Jyunji Saida

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)114-119
Number of pages6
JournalShinku/Journal of the Vacuum Society of Japan
Volume49
Issue number2
DOIs
Publication statusPublished - 2006 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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