Evaluation of organic metal-oxide-semiconductor capacitors based on a distributed constant circuit

Yoshinari Kimura, Yoshiaki Hattori, Masatoshi Kitamura

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

The capacitance characteristics of pentacene metal-oxide-semiconductor (MOS) capacitors with a large uncovered pentacene area have been investigated. The capacitance measured was examined by assuming that the uncovered area is represented by a distributed constant circuit. The frequency dependence of the capacitance was reproduced by an equation derived based on the assumption. The sheet resistance for the uncovered area of a MOS capacitor was calculated as a function of the gate voltage from the capacitance measured. The mobility of a MOS capacitor with an uncovered area was estimated by fitting a curve to the gate voltage dependence of the sheet resistance, and was in the range of 0.48-0.64 cm2 V-1 s-1. In addition, the mobilities were compared with those calculated from the current-voltage characteristics of pentacene transistors fabricated on the same substrate.

Original languageEnglish
Article number036503
JournalJapanese journal of applied physics
Volume59
Issue number3
DOIs
Publication statusPublished - 2020
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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