Evaluation of obliquely evaporated gadolinium gratings for neutron interferometry by X-ray microtomography

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Gadolinium absorption gratings are critically important devices for grating-based neutron dark-field and phase-contrast imaging. The evaporation process is an excellent candidate for preparing Gd gratings large enough for imaging applications. However, there is some concern about the lower average density of obliquely evaporated Gd, which sometimes grows with many voids that are caused by shadowing effects. We have fabricated Gd gratings with 9-µm and 4-µm pitches as part of our design and measured the density distributions of the resulting Gd deposits by three-dimensional X-ray microtomography. The obtained tomographic image data is helpful not only for fabrication process design but also estimating device performance without performing neutron irradiation experiments.

Original languageEnglish
Pages (from-to)91-95
Number of pages5
JournalMaterials Science in Semiconductor Processing
Volume92
DOIs
Publication statusPublished - 2019 Mar 15

Keywords

  • Density
  • Evaporation
  • Shadowing effects
  • Silicon microfabrication
  • Talbot-Lau interferometry
  • X-ray microscope

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Evaluation of obliquely evaporated gadolinium gratings for neutron interferometry by X-ray microtomography'. Together they form a unique fingerprint.

Cite this