Evaluation of in‐depth resolution in grimm‐type glow discharge optical emission spectrometry from differentiated depth profiles

Takahiro Hamada, Kazuaki Wagatsuma, Kichinosuke Hirokawa

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Depth profiling of surface coatings is the most significant field in analytical applications of glow discharge optical emission spectrometry. This paper suggests a method for evaluating the depth resolution of the profiles. For this purpose, the emission intensities that are differentiated as a function of sample depth can be used. The differentiated intensities follow a characteristic curve at the coating/substrate interface. The analyses of the differential curve provide useful knowledge about the depth resolution interface.

Original languageEnglish
Pages (from-to)213-218
Number of pages6
JournalSurface and Interface Analysis
Volume23
Issue number4
DOIs
Publication statusPublished - 1995 Apr

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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