Evaluation of grating periods by using pulsed laser source

Kentaro Uehara, Yuki Shimizu, Yuanliu Chen, I Ko

Research output: Contribution to conferencePaperpeer-review

Abstract

In this paper, a measurement method with a mode-locked laser source for evaluation of grating periods, which is based on the laser diffraction method with the Littrow configuration, is proposed. Optical frequencies of the mode-locked laser, which are referred to as the optical frequency comb, have deterministic mode frequencies with equal intervals in the frequency domain. Since the frequency of each comb mode can be highly stabilized by a high precision external standard, measurement accuracy of the laser diffraction method is expected to be improved. In this study, a prototype optical setup based on the proposed method is developed, and some experiments are carried out to verify the feasibility of the proposed method.

Original languageEnglish
Publication statusPublished - 2017 Nov 13
Event9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan
Duration: 2017 Nov 132017 Nov 17

Other

Other9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Country/TerritoryJapan
CityHiroshima City
Period17/11/1317/11/17

Keywords

  • Diffraction grating
  • Grating period
  • Littrow configuration
  • Nanometrology
  • Optical frequency comb

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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