Abstract
In this paper, a measurement method with a mode-locked laser source for evaluation of grating periods, which is based on the laser diffraction method with the Littrow configuration, is proposed. Optical frequencies of the mode-locked laser, which are referred to as the optical frequency comb, have deterministic mode frequencies with equal intervals in the frequency domain. Since the frequency of each comb mode can be highly stabilized by a high precision external standard, measurement accuracy of the laser diffraction method is expected to be improved. In this study, a prototype optical setup based on the proposed method is developed, and some experiments are carried out to verify the feasibility of the proposed method.
Original language | English |
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Publication status | Published - 2017 Nov 13 |
Event | 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan Duration: 2017 Nov 13 → 2017 Nov 17 |
Other
Other | 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 |
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Country/Territory | Japan |
City | Hiroshima City |
Period | 17/11/13 → 17/11/17 |
Keywords
- Diffraction grating
- Grating period
- Littrow configuration
- Nanometrology
- Optical frequency comb
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering