Evaluation of functional materials and devices using atomic force microscopy with ultrasonic measurements

Kazushi Yamanaka, Kentaro Kobari, Toshihiro Tsuji

Research output: Contribution to journalReview articlepeer-review

23 Citations (Scopus)

Abstract

Modem functional materials and devices require thorough testing for safety and reliability. Here, we describe solutions to meet this requirement in the field of scanning probe microscopy, and the most practical approach among them; ultrasonic atomic force microscopy (UAFM), In this review, we focus on evaluation of subsurface defects with scientific and technological importance, such as domains of ferroelectric materials and subsurface delamination of metal electrodes on microdevices. In addition, we show the development and application of the lateral bending (LB) mode and lateral modulation atomic force microscopy (LM-AFM) with applications in nanomaterials including carbon nanotube composites and discuss their future development in combination with UAFM.

Original languageEnglish
Pages (from-to)6070-6076
Number of pages7
JournalJapanese journal of applied physics
Volume47
Issue number7 PART 3
DOIs
Publication statusPublished - 2008 Jul 18

Keywords

  • Contact resonance
  • Defects
  • Stiffness
  • Ultrasonic atomic force microscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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