TY - JOUR
T1 - Evaluation of functional materials and devices using atomic force microscopy with ultrasonic measurements
AU - Yamanaka, Kazushi
AU - Kobari, Kentaro
AU - Tsuji, Toshihiro
PY - 2008/7/18
Y1 - 2008/7/18
N2 - Modem functional materials and devices require thorough testing for safety and reliability. Here, we describe solutions to meet this requirement in the field of scanning probe microscopy, and the most practical approach among them; ultrasonic atomic force microscopy (UAFM), In this review, we focus on evaluation of subsurface defects with scientific and technological importance, such as domains of ferroelectric materials and subsurface delamination of metal electrodes on microdevices. In addition, we show the development and application of the lateral bending (LB) mode and lateral modulation atomic force microscopy (LM-AFM) with applications in nanomaterials including carbon nanotube composites and discuss their future development in combination with UAFM.
AB - Modem functional materials and devices require thorough testing for safety and reliability. Here, we describe solutions to meet this requirement in the field of scanning probe microscopy, and the most practical approach among them; ultrasonic atomic force microscopy (UAFM), In this review, we focus on evaluation of subsurface defects with scientific and technological importance, such as domains of ferroelectric materials and subsurface delamination of metal electrodes on microdevices. In addition, we show the development and application of the lateral bending (LB) mode and lateral modulation atomic force microscopy (LM-AFM) with applications in nanomaterials including carbon nanotube composites and discuss their future development in combination with UAFM.
KW - Contact resonance
KW - Defects
KW - Stiffness
KW - Ultrasonic atomic force microscopy
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U2 - 10.1143/JJAP.47.6070
DO - 10.1143/JJAP.47.6070
M3 - Review article
AN - SCOPUS:55149124721
VL - 47
SP - 6070
EP - 6076
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7 PART 3
ER -