Evaluation of electron beam broadening due to the specimen in analytical electron microscopy

T. Oikawa, C. W. Lee, Y. Kondo, D. Shindo, K. Konno

Research output: Contribution to journalArticlepeer-review

Abstract

Understanding of electron beam broadening in specimens is important when analytical electron microscopy is carried out in the area of nanometer order with a fine electron probe. In this work, the electron beam broadening was experimentally measured for various specimens. For the specimens, amorphous SiO2, single crystal MgO and single crystal Si were used. The size of the beam diameter with and without the specimens was measured quantitatively by recording the intensity profiles accurately with an imaging plate system. As a result, the electron beam broadening was evaluated as a function of the specimen thickness, and it was compared and discussed with the values calculated on the basis of a theoretical model.

Original languageEnglish
Pages (from-to)434-436
Number of pages3
JournalNippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Volume65
Issue number5
DOIs
Publication statusPublished - 2001

Keywords

  • Amorphous silicon dioxide
  • Beam broadening
  • Fine electron probe
  • High spatial resolution
  • Magnesium oxide
  • Single crystal silicon
  • Specimen thickness

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Metals and Alloys
  • Materials Chemistry

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